High nitrogen composition GaAsN by atmospheric pressure metalorganic vapor-phase epitaxy
نویسندگان
چکیده
Highly luminescent GaAs 1~x N x alloys were successfully grown by atmospheric pressure metalorganic vapor-phase epitaxy (MOVPE). The nitrogen composition x of as high as 5.6% was obtained using trimethylgallium (TMGa), tertiarybutylarsine (TBAs) and dimethylhydrazine (DMHy) precursors. In-situ and post-growth rapid thermal annealing was performed to enhance the optical quality of the material. Intense low temperature photoluminescence was obtained from GaAsN down to 0.9 eV (1.38lm). ( 2000 Elsevier Science B.V. All rights reserved. PACS: 81.15.Gh; 78.55.!m
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